Development, production and sales of the Excimer UV irradiation unit and the UV-LED irradiation unit

Excimer UV Irradiation system

Excimer lamp Features

  • High photon energy

    It emits vacuum ultraviolet light (UVU) of 172 nm with high photon energy compared to the low pressure mercury lamp (wavelength 185 + 254 nm) which was used in conventional photo cleaning wash.

  • Low temperature treatment

    It does not emit infrared rays, processing time can be shortened and processing can be done at low temperature.

  • Instant on / off

    Since it can be turned on and off momentarily, shutter etc. are unnecessary.

    Since it is not necessary to turn on constantly, you can use the lamp for a long time.

  • Mercury free

    Not use mercury for the lamp.

  • Spectral data

    Quasi-monochromatic light (172 nm)

Flat type Features

By our proprietary technology, it is a lamp capable of high intensity and high uniform irradiation.

Tact and yield improvement can be expected.

  • High intensity

    Because it is a special lamp that emits the entire surface, the irradiation light quantity is also high, it can irradiate with high intensity.

  • High uniformity

    It can uniformly irradiate uniformly with ± 5 to 10% or less.

  • Intensity stability

    Although the intensity of conventional lamps decreases with temperature rise, you can monitor stable intensity by monitoring intensity value.

  • Lamp replacement

    Replace the lamp as a single lamp or as a lamp replacement unit, so you can exchange it relatively easily.

    Tube type Features


    It is a standard type of excimer lamp.
  • Combine the number and length of lamps by purpose.

Ecximer lamp Lineup

Flat type product index
Type Model Spec Drawing
wavelength
(mm)
Radiation area
(mm)
Intensity
(mW/cm2)
Uniformity
(%)
Utility
Batch irradiation QEF-35ST 126 φ35 5 5 Ar gass、Cooling water、
N2、AC
PDF
172 30 Cooling water、N2、
AC
PDF
QEF-100 φ100 40 PDF
QEF-160 167×167 40 PDF
QEF-230SPC 218×218 50 PDF
QEF-A4 220×310 40 PDF
QEF-300SPC φ320 80 PDF
Scan irradiation QEF-600 620×70 180 10 PDF
QEF-1200 1140×70 PDF
QEF-1600 1170×70 PDF
QEF-3200 3100×70 PDF

Surface emitting flat type

  • QEF-35ST

    For compact or experiment
    Window area
    φ35mm
    Output
    126nm:5mW/cm2 172nm:15mW/cm2
    QEF-35ST
  • QEF-100

    4 inch
    Window area
    φ100mm
    Output
    172nm:25mW/cm2
    QEF-100
  • QEF-160

    6 inch
    Window area
    167×167mm
    Output
    172nm:70mW/cm2
    QEF-160
  • QEF-230SPC

    8inch
    Window area
    218×218mm
    Output
    172nm:50mW/cm2
    QEF-230SPC
  • QEF-A4

    A4 size
    Window area
    220×310mm
    Output
    172nm:30mW/cm2
    QEF-A4
  • QEF-300SPC

    12 inch
    Window area
    φ332mm
    Output
    172nm:80mW/cm2
    QEF-300SPC
  • QEF-600

    Longer type
    Window area
    620× 72mm
    Output
    172nm:180mW/cm2
    QEF-600
  • QEF-1200

    Longer type
    Window area
    1141× 72mm
    Output
    172nm:180mW/cm2
  • QEF-1600

    Longer type
    Window area
    1570× 72mm
    Output
    172nm:180mW/cm2
  • QEF-3200

    Longer type
    Window area
    3100× 72mm
    Output
    172nm:180mW/cm2

Tube type

  • QEV-150

    For compact or experiment
    Window area
    170×25mm
    Output
    172nm:60mW/cm2
    QEV-150
  • QEV-230-3

    6 inch
    Window area
    176×176mm
    Output
    172nm:10mW/cm2
    QEV-230-3
  • QEV-230-4

    8inch
    Window area
    230×230mm
    Output
    172nm:12mW/cm2
    QEV-230-4
  • QEV-360-4

    A4 size
    Window area
    230×230mm
    Output
    172:12mW/cm2
  • QEV-360-6

    12 inch
    Window area
    340×340mm
    Output
    172nm:10mW/cm2
    QEV-360-6