- Mercury-free UV irradiation units
- LEDs with longer life than lamps
- Irradiation units best for low-temperature processes
- Flexible designs for different applications
- July 15, 2011 New product
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Nano-imprint UV-LED irradiation unit
Nano-imprint is an advanced technology that enables microfabrication process at a nano-meter level by imprinting a quartz or other template on a substrate.Challenges of achieving finer circuit line widths and lower cost simultaneously are progressing with applying this technology to the LSI, memory and other semiconductor manufacturing processes.
Size of irradiation 200φmm
Power of irradiation 100mW/cm2
QEL200CI（365nm）
QEL200CH（405nm）
Quark's excimer lamp VUV enables your new applications without wet cleaning process.
Quark pursues further developments in application fields of our vacuum ultraviolet excimer lamps in semiconductor, biotechnology, environmental science, and polymer processing for a future.In an immediate future, the low-k dielectric film residue removal by the excimer lamp VUV irradiation will be used in the production environment. At one of our customers sites, the experiment is giving us consistently positive results.
Headquarters factory
167 kinokochou ibara okayama japan
TEL +81-866-62-1367
East Japan Office
1-13 shineicho chigasaki kanagawa japan Chigasaki BLD3F
TEL +81-467-84-6467
