VUV Excimer Lamp Irradiation sysytem 126nm 172nm 193nm 222nm 308nm

Quark's excimer lamp VUV enables your new applications without wet cleaning process. Quark pursues further developments in application fields of our vacuum ultraviolet excimer lamps in semiconductor, biotechnology, environmental science, and polymer processing for a future.In an immediate future, the low-k dielectric film residue removal by the excimer lamp VUV irradiation will be used in the production environment. At one of our customers sites, the experiment is giving us consistently positive results.