- Oxygen absorbed UV light generates excited Oxygen atoms. The contamination is decomposed and vaporized by the VUV irradiation from Excimer lamp.
Excimer UV Irradiation system
| Excimer VUV Lamps | QEF35ST | Size of irradiation 35φmm Power of irradiation 126nm:5mW/cm2 172nm:15mW/cm2 193nm:10mW/cm2 222nm:10mW/cm2 |
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| 4inch Excimer UV irradiation unit | QEF100 | Size of irradiation 100φmm Power of irradiation 126nm:5mW/cm2 172nm:25mW/cm2 193nm:10mW/cm2 222nm:10mW/cm2 |
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| 6inch Excimer UV irradiation unit | QEV160 | Size of irradiation 176×176mm Power of irradiation 172nm:10mW/cm2 222nm:10mW/cm2 |
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| 6inch high power Excimer UV irradiation unit | QEF160 | Size of irradiation 167×167mm Power of irradiation 126nm:5mW/cm2 172nm:30mW/cm2 222nm:15mW/cm2 |
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| 8inch Excimer UV irradiation unit | QEV230 | Size of irradiation 230×230mm Power of irradiation 172nm:10mW/cm2 222nm:10mW/cm2 |
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| 8inch high power Excimer UV irradiation unit | QEF230 | Size of irradiation 218×218mm Power of irradiation 126nm:5mW/cm2 172nm:30mW/cm2 222nm:15mW/cm2 |
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| 12inch Excimer UV irradiation unit | QEV360 | Size of irradiation 320×320mm Power of irradiation 172nm:10mW/cm2 222nm:10mW/cm2 |
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| 300mm high power Excimer UV irradiation unit | QEF300 | Size of irradiation 320×320mm Power of irradiation 126nm:5mW/cm2 172nm:30mW/cm2 222nm:15mW/cm2 |
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| Film , Flat panel | QEX500 - QEX1600 |
Maximum length of irradiation 1600mm Power of irradiation Scan Type 172nm:70mW/cm2 Bach Type 172nm:10mW/cm2 |
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| Excimer VUV lamp |  |
