Quark Technology Co.,Ltd.

4inch Excimer UV irradiation unit

Top page Products information 4inch Excimer UV irradiation unit

4inch Excimer UV irradiation unit  QEF100

Application

  • UV / O3 cleaning
  • Dry Etch / Dry Ashing
  • UV anneal
  • UV Cure
  • CVD etc....

Specification

Power supply unit

Rated power 500W
Power supply voltage AC100V±10Ｖ, 50Hz/60Hz
Dimension 480(W)×439(D)×149(H)mm
Weight ca.8kg

Lamp housing

Lamp TYPE1 126nm 5mW/cm2
TYPE2 172nm 25mW/cm2
TYPE3 193nm 10mW/cm2
TYPE4 222nm 10mW/cm2
Irradiation surface 100φmm
Dimension 360(W)×300(D)×178(H)mm
Weight ca.6kg
Cooling Water cooling , Nitrogen
MAIL
QEF100
QEF100 4inch Excimer UV irradiation unit
QEF100 Power supply unit
QEF100 Drawing QEF100 Drawing
* Expansion window by click.
QEF100 Power supply unit Drawing QEF100 Power supply unit Drawing
* Expansion window by click.