We achieved the VUV Surface irradiation.
- VUV irradiations are 3 times compared with the current product.
- VUV uniformity are 5 times(±5%) compared with the current product.
- The use of the vacuum process became possible.
Products lineup
New product Excimer QEF series By Quark
Top Page Technology Info New product Excimer QEF series By Quark
Research results with an excimer lamp were brought together as a download links by the cooperation of each place related to a joint research with our company.
Abobe Reader that the Adobe system company destributes is necessary for seeing following PDF. (free of charge)
| Preparation of Sol-Gel Derived TiO2 TF with VUV Irradiation by a Xe2* Excimer Lamp |  1 2 3 4 |
|---|---|
| Preparation of Properties of BiLaTiOFerroelectric TF with Excimer VUV Irradiation | 1 2 3 4 5 6 |
| Room Temp Photochem. Fab. of Silica Glass Coatings with Excimer VUV Lamps | 1 2 |
| Decomposition Test Result of Chlorine Organic Compound by 222nm Excimer Lamp | |
