Excimer UV Irradiation system
| 6inch Excimer UV irradiation unit | QEV160 | Size of irradiation 176×176mm Power of irradiation 172nm:15mW/cm2 222nm:10mW/cm2 |
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| 6inch high power Excimer UV irradiation unit | QEF160 | Size of irradiation 167×167mm Power of irradiation 126nm:5mW/cm2 172nm:50mW/cm2 222nm:20mW/cm2 |
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| 8inch Excimer UV irradiation unit | QEV230 | Size of irradiation 230×230mm Power of irradiation 172nm:15mW/cm2 222nm:10mW/cm2 |
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| 8inch high power Excimer UV irradiation unit | QEF230 | Size of irradiation 218×218mm Power of irradiation 126nm:5mW/cm2 172nm:50mW/cm2 222nm:20mW/cm2 |
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| 12inch Excimer UV irradiation unit | QEV360 | Size of irradiation 340×340mm Power of irradiation 172nm:15mW/cm2 222nm:10mW/cm2 |
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| 300mm high power Excimer UV irradiation unit | QEF300 | Size of irradiation Φ320mm Power of irradiation 126nm:5mW/cm2 172nm:50mW/cm2 222nm:20mW/cm2 |
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| Film , Flat panel | QEX500 - QEX2000 |
Power of irradiation 172nm:50mW/cm2 |
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| Excimer VUV lamp |  |
UV-LED irradiation unit
| UV-LED device P5 |
Forward Voltage (@700mA) 3.8V DC Forward Current 1.5A pulse Forward Current 2A Radiation Power 150mW Peak Wavelength 367nm |
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| Aspect irradiation UV-LED unit | QEL-200 |
window area210×210mm Peek Wavelength(Select) 365nm:100mW/cm2 385nm:100mW/cm2 395nm:100mW/cm2 405nm:100mW/cm2 |
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| In-Line UV-LED unit | QEL-1200 |
window area10×1200mm Peek Wavelength(Select) 365nm:100mW/cm2 385nm:100mW/cm2 395nm:100mW/cm2 405nm:100mW/cm2 |
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measurement device
Introduction of dry process Application
| Flat panel |  |
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| Photomask |  |
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| Semiconductor |  |
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| Others | LED,LD Organic films |
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