Quark Technology Co.,Ltd.

Film , Flat panel Excimer VUV lamp unit

Top page Products information Film , Flat panel Excimer VUV lamp unit

Film , Flat panel Excimer VUV lamp unit

Application

  • UV / O3 cleaning
  • Dry Etch / Dry Ashing
  • UV anneal
  • UV Cure
  • LIPS etc....

Specification

System1   3 Lamps

Irradiation 70mW/cm2
Dimension 500mm - 2200mm
Cooling Water cooling , Nitrogen
Lamp Life 2500 h

System1   12 Lamps

Irradiation 20mW/cm2
Cooling Water cooling , Nitrogen
Lamp Life 2500 h
MAIL
Film , Flat panel Excimer VUV lamp unitQEX500 Film , Flat panel Excimer VUV lamp unit QEX500
Film , Flat panel Excimer VUV lamp unit
Film , Flat panel Excimer VUV lamp unit
Film , Flat panel Excimer VUV lamp unit Film , Flat panel Excimer VUV lamp unit Drawing
*Expansion window by click.