VUV Excimer Lamp Irradiation sysytem 126nm 172nm 193nm 308nm

6inch Excimer UV irradiation unit  QEV160

Application UV / O3 cleaning Dry Etch / Dry Ashing UV anneal UV Cure CVD etc.... Specification Power supply unit Rated power 800W/1unit Power supply voltage AC100V±10Ｖ, 50Hz/60Hz Dimension 480(W)×439(D)×149(H)mm Weight ca.8kg Lamp housing Lamp 3lamps 172nm 10mW/cm2 Irradiation surface 176×176mm Dimension 232(W)×498(D)×289(H)mm Weight ca.10kg Cooling Water cooling , Nitrogen

6inch Excimer UV irradiation unit QEV160 QEV160 Drawing * Expansion window by click. QEV160Power supply unit Drawing * Expansion window by click.

6inch high power Excimer UV irradiation unit  QEF160

Application UV / O3 cleaning Dry Etch / Dry Ashing UV anneal UV Cure CVD etc.... Specification Power supply unit Rated power 500W/1unit Power supply voltage AC200V Dimension 505(W)×545(D)×120(H)mm Weight ca.18kg Cooling Water Lamp housing Lamp flat lamps (wavelength 172nm) Irradiation 30mW/cm2 Difference±5% Irradiation surface 167×167mm Dimension 400(W)×300(D)×184.3(H)mm Weight ca.12kg Cooling Nitrogen Function Irradiation monitor Power control Vacuum chamber available New product 126nm VUV irradiation unit

6inch high power Excimer UV irradiation unit QEF160 QEF160 Drawing * Expansion window by click. QEF160Power supply unit Drawing * Expansion window by click.