Development, production and sales of the Excimer UV irradiation unit and the UV-LED irradiation unit

Excimer vs. others

Methods Excimer Low-pressure mercury lamp Plasma Corona
Damage        
Unevenness        
Utility        
Effect        
Initial cost        
Operating cost        

Less damage

The corona discharge method and the plasma method apply discharge directly to an object so that the object is damaged. The excimer lamp method applies only VUV light to an object so that the object is hardly damaged.

Uniform irradiation

Irradiation of the excimer lamp method, which uses light, is uniform as compared to that of the corona discharge /plasma method, which uses discharge. The excimer lamp method has great effect on uniform irradiation over a large area.