Excimer vs. others
| Methods | Excimer | Low-pressure mercury lamp | Plasma | Corona |
|---|---|---|---|---|
| Damage | ||||
| Unevenness | ||||
| Utility | ||||
| Effect | ||||
| Initial cost | ||||
| Operating cost |
Less damage
The corona discharge method and the plasma method apply discharge directly to an object so that the object is damaged. The excimer lamp method applies only VUV light to an object so that the object is hardly damaged.
Uniform irradiation
Irradiation of the excimer lamp method, which uses light, is uniform as compared to that of the corona discharge /plasma method, which uses discharge. The excimer lamp method has great effect on uniform irradiation over a large area.