Development, production and sales of the Excimer UV irradiation unit and the UV-LED irradiation unit

World-first flat surface emitting excimer

We achieved the VUV Surface irradiation.

  • Irradiation power is three times higher than the conventional tube-type Excimer unit for 172nm.
  • It has achieved +/-7% of irradiation distribution, while that of the tube type is +/-15%.
  • It is compatible with the vacuum process when the lamp house structure is changed.