Development, production and sales of the Excimer UV irradiation unit and the UV-LED irradiation unit

Products information

Excimer UV Irradiation system

Size Surface emitting flat type Window area Tube type Window area
For compact or experiment

QEF-35ST

φ35mm

QEV-150

170×25mm

4 inch

QEF-100

φ100mm

6 inch

QEF-160

167×167mm

QEV-230-3

176×176mm

8inch

QEF-230SPC

218×218mm

QEV-230-4

230×230mm

A4 size

QEF-A4

220×310mm

QEV-360-4

230×230mm

12 inch

QEF-300SPC

φ332mm

QEV-360-6

340×340mm

Longer type

QEF-600

QEF-1200

QEF-1600

QEF-3200

620× 72mm

1141× 72mm

1570× 72mm

3100× 72mm

UV-LED irradiation unit

UV-Laser

  • LD solid state laser
    ・【YAG Laser】  Wavelength:355nm  Average output power:15W @ 50kHz  Repetition rate:1kHz~300kHz ・【YLF Laser】  Wavelength:263nm  Average output power:250mW @ 1kHz  Repetition rate:~4kHz

    QLA-263

measurement device

  • UV Monitor

    The illumination intensity monitor who measures excimer and UV-LED irradiation. Illumination intensity measurement of 172nm, 365nm and 405nm is possible.
  • Contact angle measurement device

    Contact angle measurement device of the small Portable type with which the hydrophilicity of the surface is gauged.
    Contact angle measurement device PG-X