Excimer UV Irradiation system
Excimer lamp Features
High photon energy
It emits vacuum ultraviolet light (UVU) of 172 nm with high photon energy compared to the low pressure mercury lamp (wavelength 185 + 254 nm) which was used in conventional photo cleaning wash.
Low temperature treatment
It does not emit infrared rays, processing time can be shortened and processing can be done at low temperature.
Instant on / off
Since it can be turned on and off momentarily, shutter etc. are unnecessary.
Since it is not necessary to turn on constantly, you can use the lamp for a long time.
Not use mercury for the lamp.
Quasi-monochromatic light (172 nm)
Flat type Features
By our proprietary technology, it is a lamp capable of high intensity and high uniform irradiation.
Tact and yield improvement can be expected.
Because it is a special lamp that emits the entire surface, the irradiation light quantity is also high, it can irradiate with high intensity.
It can uniformly irradiate uniformly with ± 5 to 10% or less.
Although the intensity of conventional lamps decreases with temperature rise, you can monitor stable intensity by monitoring intensity value.
Replace the lamp as a single lamp or as a lamp replacement unit, so you can exchange it relatively easily.
Tube type Features
It is a standard type of excimer lamp.
- Combine the number and length of lamps by purpose.
Ecximer lamp Lineup
|Corresponding work size||12inch||8inch||6inch||4inch||–||–|
|Corresponding work size||G6||G3||–|
|Corresponding work size||12inch||8inch||6inch|
|Corresponding work size||width 1200mm||width 850mm||width 750mm||width 150mm|