Excimer UV Irradiation system

Excimer lamp Features

• High photon energy

  It emits vacuum ultraviolet light (UVU) of 172 nm with high photon energy compared to the low pressure mercury lamp (wavelength 185 + 254 nm) which was used in conventional photo cleaning wash.

• Low temperature treatment

  It does not emit infrared rays, processing time can be shortened and processing can be done at low temperature.

• Instant on / off

  Since it can be turned on and off momentarily, shutter etc. are unnecessary.

  Since it is not necessary to turn on constantly, you can use the lamp for a long time.

• Mercury free

  Not use mercury for the lamp.

• Spectral data

  Quasi-monochromatic light (172 nm)

  

Flat type Features

By our proprietary technology, it is a lamp capable of high intensity and high uniform irradiation.

Tact and yield improvement can be expected.

• High intensity

  Because it is a special lamp that emits the entire surface, the irradiation light quantity is also high, it can irradiate with high intensity.

• High uniformity

  It can uniformly irradiate uniformly with ± 5 to 10% or less.

• Intensity stability

  Although the intensity of conventional lamps decreases with temperature rise, you can monitor stable intensity by monitoring intensity value.

• Lamp replacement

  Replace the lamp as a single lamp or as a lamp replacement unit, so you can exchange it relatively easily.

Tube type Features

　　

It is a standard type of excimer lamp.

• Combine the number and length of lamps by purpose.

Ecximer lamp Lineup

Flat type 

 

 

Tube type